Artikelliste
- Lithiumsilikat (Li2SiO3)-Sputtertarget
- Lithium-Titan-Oxid (LTO) (Li4Ti5O12)-Sputter-Target
- Lithium-Nickel-Phosphat (LiNiPO4)-Sputtertarget
- Lithium-Vanadium-Phosphat (Li3V2(PO4)3)-Sputter-Target
- Lithium-Kobalt-Oxid (LiCoO2)-Sputter-Target
- Lithium-Nickel-Oxid (LiNiO2)-Sputtertarget
- Lithium Tantalate (LitaO3) -Speifting-Ziel
- Bariumzirkonat (Bariumzirkoniumoxid) (BaZrO3)-Sputtertarget
- Sputtertarget aus Aluminium-Zirkonium-Legierung (AlZr)
- Aluminium Tantal Zirkonium (Altazr (in% 33.3: 33.3: 33.3)) - Delta-Ziel