Keramische Zerstäubungsziele.
- Lanthan-Strontium-Ferrit (La0.8Sr0.2FeO3)-Sputter-Target
- Lanthanfluorid (LaF3)-Sputtertarget
- Lanthan-Titanat (Lanthan-Titan-Oxid) (LaTiO3)-Sputter-Target
- Lanthan-Nickel-Oxid (LaNiO)-Sputtertarget
- Lanthan-Aluminiumoxid (LaAlO3)-Sputter-Target
- Lutetium-Nickel-Oxid (LuNiO3)-Sputter-Target
- Lutetiumvanadat (LuVO4)-Sputtertarget
- Ytterbiumfluorid (YbF3)-Sputtertarget
- Wismutgallat (Wismutgalliumoxid) (BiGa2O3)-Sputtertarget
- Holmiumoxid (Ho2O3)-Sputtertarget